Successfully developed MEMS equipment for powering wireless sensor nodes

Successfully developed MEMS equipment for powering wireless sensor nodes

Holst Centre, a research and development organization focused on developing shared technologies for wireless autonomous sensor solutions, has developed a new set of energy harvesting applications that can generate up to 85 microwatts of power. This piezoelectric energy harvester uses a microelectromechanical system (MEMS)-a small silicon chip that can combine mechanical parts, sensors, solenoids, and electronic devices.

MEMS has been used in a variety of items in the past few decades, from inkjet printers to accelerometers for automotive airbags. The packaging collector converts the vibration into energy, and then collects and stores the energy for powering the wireless sensor node. Researchers at the Holst Centre industrial micro power generation and storage project develop a piezoelectric collection scheme that charges the temperature sensor so that it can send data wirelessly in a fully autonomous manner.

The collector consists of a group of silicon cores suspended in a beam of light. By changing the size of the beam and the silicon core group, the collector reverberation frequency can be designed at any value between 150-1,200 Hz. Wafer packaging is completed in three steps. The piezoelectric collector is connected to a wireless temperature sensor. The system can generate enough energy to measure the ambient temperature and send it to a base station every 15 seconds.

According to Holst Centre, the results of the study prove the feasibility of developing a fully autonomous collector for industry applications. Ultimately, the research team claims that the technology can be used to charge sensors in such applications as tire pressure monitoring and repair of moving or rotating mechanical parts.

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